Different scaling ratio in feol / mol/ beol
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsLiang-Yao Lee, Tsung-Chieh Tsai, Juing-Yi Wu, Chun-Yi Lee
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsLiang-Yao Lee, Tsung-Chieh Tsai, Juing-Yi Wu, Chun-Yi Lee
Estimating the term…
The present disclosure, in some embodiments, relates to an integrated chip. The integrated chip includes a first contact and a second contact disposed over a substrate. A center of a first upper surface of the first contact is laterally separated from a center of a second upper surface of the second contact by a first distance. A first interconnect contacts the first upper surface and a second interconnect contacts the second upper surface. A center of a first lower surface of the first interconnect is laterally separated from a center of a second lower surface of the second interconnect by a second distance that is greater than the first distance.
An integrated chip, comprising:
An integrated chip, comprising:
A method for generating a scaled integrated chip design, comprising:
Dependencies are inferred from the claim text.