Fastening automation apparatus for upper electrode

A fastening apparatus, comprising:

• a ring;
• and
• a plurality of fastening modules movably secured to the ring, each fastening module having a first frame installed on the ring so as to be movable in a radial direction, a driving source installed in the first frame, and a fastening bit connected to the driving source that is configured to rotate,
• wherein, when an upper electrode of an etching facility is installed in the etching facility, the first frame of each of the plurality of fastening modules is moved and the fastening bit of each of the plurality of fastening modules is inserted into a respective cam nut of the upper electrode and rotated at the same time.

A fastening apparatus, comprising:

• a ring;
• a plurality of fastening modules movably secured to the ring, each fastening module comprising:
• a driving source;
• a power transmission unit;
• a fastening bit connected to the power transmission unit;
• and
• a driving shaft operably connected to the driving source and to the power transmission unit, wherein rotation of the driving shaft by the driving source causes rotation of the fastening bit via the power transmission unit;
• and
• a control unit configured to operate the plurality of fastening modules simultaneously.