Setting Up Inspection of a Specimen

A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for setting up inspection of a specimen, wherein the computer-implemented method comprises:

• acquiring a reference image for a specimen;
• modifying the reference image to fit the reference image to a design grid thereby generating a golden grid image;
• and
• storing the golden grid image for use in inspection of the specimen, wherein the inspection comprises aligning a test image of the specimen generated from output of an inspection subsystem responsive to energy detected from the specimen to the golden grid image, and wherein said acquiring, modifying, and storing are performed by the computer system.

A computer-implemented method for setting up inspection of a specimen, comprising:

• acquiring a reference image for a specimen;
• modifying the reference image to fit the reference image to a design grid thereby generating a golden grid image;
• and
• storing the golden grid image for use in inspection of the specimen, wherein the inspection comprises aligning a test image of the specimen generated from output of an inspection subsystem responsive to energy detected from the specimen to the golden grid image, and wherein said acquiring, modifying, and storing are performed by one or more computer subsystems.