Micro scanning mirror
AssigneeCoretronic MEMS Corporation
InventorsHsi-Wen Tung, Ming-Ching Wu
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AssigneeCoretronic MEMS Corporation
InventorsHsi-Wen Tung, Ming-Ching Wu
Estimating the term…
A micro scanning mirror includes a lens, a piezoelectric material layer, two first rotating shaft elements, and first driving electrodes. A first axial direction passes through a center of the lens. The piezoelectric material layer is arranged along a circumferential direction of the lens and has first driving electrode regions. Each first spacing region where the piezoelectric material layer is not disposed is formed between two adjacent first driving electrode regions. Each first rotating shaft element is located between one of the first spacing regions and the corresponding adjacent first driving electrode region, and the first rotating shaft element connect the lens and the piezoelectric material layer located in the first driving electrode regions. The first driving electrodes are respectively located on the corresponding first driving electrode regions. The micro scanning mirror can obtain a large rotation angle of the mirror on the same driving condition and has good reliability.
A micro scanning mirror, comprising a lens, a piezoelectric material layer, two first rotating shaft elements, and a plurality of first driving electrodes, wherein
Dependencies are inferred from the claim text.