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US 2022/0065920 A1Published application
Chamber module and test handler including the same
AssigneeSemes Co., Ltd.
InventorsHyon Jin LEE, Jun Seok LEE
Life of this patent
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Abstract
A chamber module and a test handler including the same are disclosed. The chamber module includes a soak chamber providing a temperature adjusting space for adjusting a temperature of semiconductor devices, an elevating member disposed in the soak chamber and for elevating a tray in which the semiconductor devices are accommodated, a guide member extending in a vertical direction in the soak chamber and for guiding movement of the elevating member, and a temperature adjusting part for adjusting a temperature of the guide member.
Claims20
A chamber module comprising:
- a soak chamber configured to provide a temperature adjusting space for adjusting a temperature of semiconductor devices;
- an elevating member disposed in the soak chamber and configured to elevate a tray in which the semiconductor devices are accommodated;
- a guide member extending in a vertical direction in the soak chamber and configured to guide movement of the elevating member;
- and
- a temperature adjusting part configured to adjust a temperature of the guide member.
2 more elements
A chamber module comprising:
- a soak chamber configured to provide a temperature adjusting space for adjusting a temperature of semiconductor devices;
- an elevating member disposed in the soak chamber and configured to elevate a tray in which the semiconductor devices are accommodated;
- a first guide member extending in a vertical direction in the soak chamber and configured to guide movement of the elevating member;
- a second guide member extending in the vertical direction in the soak chamber, disposed to be spaced apart from the first guide member in a first horizontal direction, and configured to guide the movement of the elevating member;
- and
- a temperature adjusting part configured to adjust a temperature of the first and second guide members.
3 more elements
A test handler comprising:
- a chamber module configured to adjust a temperature of the semiconductor devices accommodated in a tray and perform an electrical test on the semiconductor devices;
- a loader module configured to load the tray into the chamber module;
- and
- an unloader module configured to unload the tray from the chamber module,
- wherein the chamber module comprises:
- a soak chamber configured to provide a temperature adjusting space for adjusting the temperature of semiconductor devices;
- an elevating member disposed in the soak chamber and configured to elevate the tray;
- a guide member extending in a vertical direction in the soak chamber and configured to guide movement of the elevating member;
- and
- a temperature adjusting part configured to adjust a temperature of the guide member.
7 more elements
Dependencies are inferred from the claim text.