Method for Manufacturing ScAlN Target
AssigneeSolmates B.V.
InventorsWillem Cornelis Lambert Hopman, Jan Matthijn Dekkers
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Abstract
The invention relates to a method for producing a scandium aluminum nitride (ScAlN) target body for pulsed laser deposition (PLD), which includes the steps of: providing a scandium aluminum alloy body; pulverizing the scandium aluminum alloy body into scandium aluminum particles; nitridizing the scandium aluminum particles into scandium aluminium nitride particles; and hot pressing the scandium aluminum nitride particles into a scandium aluminum nitride target body.
Claims9
A method for producing a scandium aluminum nitride (ScAlN) target body for pulsed laser deposition (PLD), which method comprises the steps of:
- providing a scandium aluminum alloy body;
- pulverizing the scandium aluminum alloy body into scandium aluminum particles;
- nitridizing the scandium aluminum particles into scandium aluminium nitride particles;
- and
- hot pressing the scandium aluminum nitride particles into a scandium aluminum nitride target body.
Dependencies are inferred from the claim text.