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US 2022/0064487 A1Published application
Polishing compositions and methods of using the same
OwnerZachary L. Schaefer, Eric Turner +1inventors
InventorsZachary L. Schaefer, Eric Turner, Carl Ballesteros
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Abstract
This disclosure relates to a polishing composition that includes at least one abrasive; at least one pH adjuster, and at least one biosurfactant, as well as a method of using the polishing composition to polish a substrate. The biosurfactant can be selected from the group consisting of glycolipids, lipopeptides, and mixtures thereof.
Claims17
A polishing composition, comprising:
- at least abrasive;
- at least one pH adjuster;
- and
- at least one biosurfactant selected from the group consisting of glycolipids, lipopeptides, and mixtures thereof.
1 more element
Dependencies are inferred from the claim text.