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US 2022/0045661 A1Published application
Transversely-excited film bulk acoustic resonator comprising small cells
AssigneeResonant Inc.
InventorsNeal Fenzi, Ryo Wakabayashi, Bryant Garcia, Greg Dyer
Life of this patent
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Abstract
Acoustic resonator devices are disclosed. An acoustic resonator device includes a plurality of cells electrically connected in parallel. Each cell includes an interdigital transducer (IDT) on a piezoelectric plate, the IDT having at least 15 and not more than 35 interleaved fingers.
Claims26
An acoustic resonator device comprising:
- a plurality of cells electrically connected in parallel, each cell comprising:
- an interdigital transducer (IDT) on a portion of a piezoelectric plate, the IDT having at least 15 and not more than 35 interleaved fingers, wherein the interleaved fingers of the IDTs of two or more of the plurality of cells are on a common diaphragm;
- and
- a heat sink finger between adjacent cells on the common diaphragm.
1 more element
An acoustic resonator device comprising:
- a plurality of cells electrically connected in parallel, each cell comprising:
- a portion of a piezoelectric plate;
- and
- an interdigital transducer (IDT) on the portion of the piezoelectric plate, the IDT comprising interleaved fingers,
- wherein the portion of the piezoelectric plate and the IDT of each of the plurality of cells are configured such that a radio frequency signal applied to the IDT excites a shear primary acoustic mode in the portion of the piezoelectric plate, and
- wherein each of the plurality of cells are acoustically isolated from the other cells.
3 more elements
An acoustic resonator device comprising:
- a plurality of cells electrically connected in parallel, each cell comprising:
- an interdigital transducer (IDT) on a portion of a piezoelectric plate, the IDT having at least 15 and not more than 35 interleaved fingers, wherein the interleaved fingers of the IDTs of two or more of the plurality of cells are on a common diaphragm;
- and
- one or more openings through the common diaphragm between adjacent cells on the common diaphragm.
1 more element
Dependencies are inferred from the claim text.