Piezoelectric device
AssigneeMurata Manufacturing Co., Ltd.
InventorsYutaka KISHIMOTO, Shinsuke IKEUCHI, Masayuki SUZUKI, Fumiya KUROKAWA
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AssigneeMurata Manufacturing Co., Ltd.
InventorsYutaka KISHIMOTO, Shinsuke IKEUCHI, Masayuki SUZUKI, Fumiya KUROKAWA
Estimating the term…
A piezoelectric device includes a base portion and an upper layer on an upper side of and supported by the base portion. The upper layer includes a membrane portion that does not overlap with the base portion in plan view. The membrane portion includes at least one piezoelectric layer sandwiched by electrode layers from a top and a bottom thereof. An intermediate layer is between a lower electrode and the base portion. The intermediate layer includes one or more individual layers, and an individual layer exposed as a lower surface of the membrane portion among the one or more individual layers includes a bent portion, which extends from the lower surface of the membrane portion to a lateral wall, on a boundary between a portion defining and functioning as the lower surface of the membrane portion and a portion overlapping with the base portion.
A piezoelectric device comprising:
Dependencies are inferred from the claim text.