Semiconductor structure and method for manufacturing same
AssigneeChangxin Memory Technologies, Inc.
InventorJingwen LU
Life of this patent
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AssigneeChangxin Memory Technologies, Inc.
InventorJingwen LU
Estimating the term…
A semiconductor structure includes: a substrate with conductive contact regions; a bit line structure and an isolation wall located on a sidewall of the bit line structure, the isolation wall includes at least one isolation layer including a first isolation part close to the bit line structure and a second isolation part deviating from the same, the second isolation part has doped ions, such that it has a greater hardness than the first isolation part, or has a smaller dielectric constant than the first isolation part; and a capacitor contact hole, which exposes the conductive contact region, and has a top width greater than a bottom width in a direction parallel to an orientation of the bit line structure.
A semiconductor structure, comprising:
A method for manufacturing a semiconductor structure, comprising:
Dependencies are inferred from the claim text.