Channel hole and bitline architecture and method to improve page or block size and performance of 3d nand
AssigneeYangtze Memory Technologies Co., Ltd.
InventorJun LIU
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AssigneeYangtze Memory Technologies Co., Ltd.
InventorJun LIU
Estimating the term…
Embodiments of a memory finger structure and architecture for a three-dimensional memory device and fabrication method thereof are disclosed. The method includes forming an alternating layer stack, forming a plurality of slit structures, forming a plurality of conductor/dielectric layer pairs, forming a first column of vertical memory strings, forming a second column of vertical memory strings, and forming a plurality of bitlines. The plurality of slit structures each extend vertically through the alternating layer stack and laterally along a wordline direction to divide the alternating layer stack into at least one memory finger. The vertical memory strings in the first column are displaced relative to each other along the wordline direction. The vertical memory strings in the second column are displaced relative to each other along the wordline direction. Each bitline is connected to an individual vertical memory string in the first and second columns.
A method for forming a memory finger in a three-dimensional memory device, comprising:
A method for forming a memory finger in a three-dimensional memory device, comprising:
Dependencies are inferred from the claim text.