Chip protected against back-face attacks
AssigneeSTMicroelectronics (Crolles 2) SAS
InventorsSebastien Petitdidier, Nicolas Hotellier, Raul Andres Bianchi, Alexis Farcy, Benoit Froment
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AssigneeSTMicroelectronics (Crolles 2) SAS
InventorsSebastien Petitdidier, Nicolas Hotellier, Raul Andres Bianchi, Alexis Farcy, Benoit Froment
Estimating the term…
A method for fabricating a semiconductor chip includes forming a plurality of conducting pads at a front face of a substrate, thinning a rear face of the substrate, etching openings under each conducting pad from the rear face, depositing a layer of a dielectric on walls and a bottom of the openings, forming a conducting material in the openings, and forming a conducting strip on the rear face. The conducting strip is electrically connected to the conducting material of each of the openings. The etching is stopped when the respective conducting pad is reached.
A method for fabricating a semiconductor chip, the method comprising:
A method for fabricating a semiconductor chip, the method comprising:
The method according to claim ii, wherein etching the rear face of the substrate to form the first plurality of openings comprises at least partially etching the shallow trench isolation regions.
A method of determining whether a hack attempt is made on an electronic chip that includes a first and second conducting pads at a front face that are capacitively coupled by a conducting strip at a rear face opposite the front face, the method comprising:
Dependencies are inferred from the claim text.