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US 2022/0044951 A1Published application
Container and substrate treating apparatus
AssigneeSemes Co., Ltd.
InventorsDUKHYUN SON, BYUNG KYU KIM
Life of this patent
Estimating the term…
Abstract
Disclosed is a container. The container includes a housing having an interior space, and a support part that supports an expendable component in the interior space, and the support part includes an alignment pin that aligns the expendable component.
Claims20
A container comprising:
- a housing having an interior space;
- and
- a support part configured to support an expendable component in the interior space,
- wherein the support part includes:
- an alignment pin configured to align the expendable component.
2 more elements
A substrate treating apparatus comprising:
- a process chamber configured to perform a treatment process;
- a load pot configured to receive an expendable component of the process chamber and in which a container having an interior space is seated;
- and
- a transfer robot configured to transfer the expendable component between the process chamber and the container,
- wherein the container includes:
- a support part having:
- a plurality of support slots that support the expendable component;
- and an alignment block detachably mounted on the support slot and provided with an alignment pin inserted into a groove formed in the expendable component.
5 more elements
A substrate treating apparatus comprising:
- a process chamber configured to treat a substrate by using plasma;
- a load pot, in which a container that receives a focusing ring provided in the process chamber is seated;
- and
- a transfer robot configured to transfer the focusing ring between the process chamber and the container,
- wherein the container includes:
- a support part having:
- a plurality of support slots that support the focusing ring;
- and an alignment block detachably mounted on the support slot and provided with an alignment pin inserted into a groove formed in the focusing ring.
5 more elements
Dependencies are inferred from the claim text.