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US 2022/0044948 A1Published application
Monitoring wafer and monitoring system
AssigneeChangxin Memory Technologies, Inc.
InventorsBowei ZHANG, Lei PAN, Rong FU
Life of this patent
Estimating the term…
Abstract
The present disclosure provides a monitoring wafer and a monitoring system. The monitoring wafer includes: an initial wafer, a searchlight module, a data acquisition module and a wireless transmission module, the searchlight module is configured to emit searchlight to the wafer chuck, the data acquisition module is configured to acquire searchlight information of the searchlight on the wafer chuck, and the wireless transmission module is configured to receive and transmit the searchlight information.
Claims13
A monitoring wafer, comprising:
- an initial wafer, the initial wafer having a front side and a back side, the back side facing a wafer chuck;
- and
- a wireless transmission module, as well as a searchlight module and a data acquisition module that are located on the back side, the searchlight module is configured to emit searchlight to the wafer chuck, the data acquisition module is configured to acquire searchlight information of the searchlight on the wafer chuck, and the wireless transmission module is configured to receive and transmit the searchlight information.
Dependencies are inferred from the claim text.