Plasma transport channel device and coating equipment

Abstract

The present invention relates to a plasma transport channel device and coating equipment, including a channel body. An A channel configured for a transport of a plasma is formed inside the channel body, two ends of the A channel constitute an A inlet and an A outlet, respectively, a cooling unit configured for cooling the channel body is arranged on or beside the channel body, and/or, an adsorption unit configured for adsorbing an impurity component in the plasma is arranged on an inner wall of the channel body. In the present invention, the channel body is cooled by the cooling unit arranged on or beside the channel body, so as to achieve the purpose of heat dissipation and temperature reduction of the channel body. The impurity component in the plasma is adsorbed by the adsorption unit arranged on the inner wall of the channel body, thereby improving the effect.

Dependencies are inferred from the claim text.