Magnetic shielding for plasma sources
AssigneeLam Research Corporation
InventorsHema Swaroop Mopidevi, Neil Martin Paul Benjamin, John Pease, Thomas Anderson
Life of this patent
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Abstract
In some examples, a magnetic shield for a plasma source is provided. An example magnetic shield comprises a back-shell. The back-shell includes a cage defined, at least in part, by an arrangement of bars of ferro-magnetic material. The cage is sized and configured to at least extend over a top side of an RF source coil for the plasma source.
Claims11
A magnetic shield for a plasma source, the magnetic shield comprising:
- a cage including an arrangement of bars of ferro-magnetic material, wherein
- the cage is sized and configured to at least extend over a top side of an RF source coil for the plasma source, and
- wherein the arrangement of ferro-magnetic bars defines an open cage having an open side, and
- wherein a bottom side of the RF source coil, when in use, faces the open side.
The magnetic shield of claim 4, wherein a circumference of the open side or the closed side of the cage is substantially equidistant from a circumference of an outer periphery of the RF source coil. The magnetic shield of claim 5, wherein the arrangement of ferromagnetic bars further includes an array of ferro-magnetic bars each arranged orthogonally to a respective one of the ferro-magnetic bars of the closed side of the cage.
A magnetic shield for a plasma source, the magnetic shield comprising:
- a closed cage including an arrangement of bars of ferro-magnetic material, wherein
- the closed cage is sized and configured to fully surround and enclose an RF source coil for the plasma source, and
- wherein the arrangement of ferro-magnetic bars defines first and second closed sides of the closed cage, each closed side of the closed cage including an array of radially spaced ferromagnetic bars extending between a central region of the closed side and an outer edge thereof.
Dependencies are inferred from the claim text.