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US 2022/0037852 A1Published application
Surface emitting laser device and surface emitting laser apparatus having the same
AssigneeSuzhou Lekin Semiconductor Co., Ltd.
InventorsSe Yeon JUNG, Seung Hwan KIM
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Abstract
The surface emitting laser device according to the embodiment includes a substrate, a first metal layer disposed on the substrate, a second metal layer disposed on the first metal layer, and a third metal layer disposed between the first metal layer and the second metal layer. The first to third metal layers may include different materials, and the second metal layer may include copper (Cu). The third metal layer may prevent diffusion of copper from the second metal layer into the first metal layer.
Claims20
A surface emitting laser device, comprising:
- a substrate;
- a first metal layer disposed on the substrate;
- a second metal layer disposed on the first metal layer;
- and
- a third metal layer disposed between the first metal layer and the second metal layer,
- wherein the first to third metal layers include different materials,
- wherein the second metal layer includes copper (Cu), and
- wherein the third metal layer prevents diffusion of copper from the second metal layer into the first metal layer.
5 more elements
Dependencies are inferred from the claim text.