Non-selective epitaxial source/drain deposition to reduce dopant diffusion for germanium nmos transistors
AssigneeIntel Corporation
InventorsGlenn A. GLASS, Anand S. MURTHY, Karthik JAMBUNATHAN, Cory C. BOMBERGER, Tahir GHANI, Jack T. KAVALIEROS, Benjamin CHU-KUNG, Seung Hoon SUNG, Siddharth CHOUKSEY
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