Array Of Capacitors, Array Of Memory Cells, Methods Of Forming An Array Of Capacitors, And Methods Of Forming An Array Of Memory Cells

A method of forming an array of capacitors, comprising:

• forming rows and columns of horizontally-spaced openings in a substrate;
• forming fill material in multiple of the columns of the openings to form pillars in the multiple columns and forming lower capacitor electrodes in a plurality of the columns that are between the pillars, the fill material being of different composition from that of the lower capacitor electrodes, the pillars being between a plurality of horizontally-spaced groups individually comprising the lower capacitor electrodes, immediately-adjacent of the groups being horizontally spaced apart from one another by a gap that comprises at least one of the columns of the pillars;
• forming a capacitor insulator over the lower capacitor electrodes and the pillars;
• forming upper capacitor electrode material over the capacitor insulator, the lower capacitor electrodes, and the pillars;
• the upper capacitor electrode material extending across the gap and connecting the upper capacitor electrode material that is in the immediately-adjacent groups;
• and
• removing at least a portion of the upper capacitor electrode material from the gap to disconnect the upper capacitor electrode material from being connected between the immediately-adjacent groups and forming a horizontally-elongated conductive line atop individual of the groups that directly electrically couples together the upper capacitor electrode material there-below in that individual group.

An array of capacitors comprising:

• a plurality of horizontally-spaced groups individually comprising a plurality of horizontally-spaced lower capacitor electrodes;
• a capacitor insulator over the lower capacitor electrodes;
• an upper capacitor electrode that is common to all capacitors in individual of the groups;
• the capacitors in the individual groups individually comprising one of the lower capacitor electrodes, the capacitor insulator, and the common upper capacitor electrode in the respective individual group;
• a horizontally-elongated conductive line atop and directly electrically coupled with the upper capacitor electrode in the individual groups;
• and
• horizontally-spaced pillars between immediately-adjacent of the individual groups, the pillars being circuit inoperative.

An array of ferroelectric memory cells individually comprising a ferroelectric capacitor above a transistor, comprising:

• rows and columns of vertical transistors, a gateline line interconnecting multiple of the transistors along individual of the rows in a row direction, a digitline interconnecting multiple of the transistors along individual of the columns in a column direction, the transistors individually comprising a lower source/drain region directly electrically coupled with individual of the digitlines, the transistors individually comprising an upper source/drain region;
• a plurality of horizontally-spaced groups individually comprising a plurality of horizontally-spaced lower capacitor electrodes, individual of the lower capacitor electrodes being directly above and directly electrically coupled to individual of the upper source/drain regions, immediately adjacent of the groups being horizontally spaced apart from one another by a gap that is horizontally elongated in the column direction;
• a ferroelectric capacitor insulator over the lower capacitor electrodes;
• an upper capacitor electrode that is common to all capacitors in individual of the groups;
• the capacitors in the individual groups individually comprising one of the lower capacitor electrodes, the capacitor insulator, and the common upper capacitor electrode in the respective individual group;
• a horizontally-elongated conductive line atop and directly electrically coupled with the upper capacitor electrode in the individual groups;
• and
• horizontally-spaced pillars in the gap between immediately-adjacent of the individual groups, the pillars being circuit inoperative.