Preparation method for semiconductor device
AssigneeCsmc Technologies Fab2 Co., Ltd.
InventorYuanbao LIAO
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AssigneeCsmc Technologies Fab2 Co., Ltd.
InventorYuanbao LIAO
Estimating the term…
The present application relates to a preparation method for a semiconductor device, comprising: sequentially forming an isolating dielectric layer and a doped semiconductor layer of a first conductivity type on a non-primitive cell area of a semiconductor substrate; performing a first conductivity type of well injection by using the semiconductor layer and the isolating dielectric layer as masks, and forming a well area in a primitive cell area; forming an operation structure in the well area, and forming a protection structure in the semiconductor layer; and forming an interlayer dielectric layer on the operation structure and the protection structure, forming a contact hole in the interlayer dielectric layer, forming a metal interconnection layer connected to the contact hole on the interlayer dielectric layer, and connecting the operation structure and the protection structure by means of the metal interconnection layer and the contact hole.
A method for manufacturing a semiconductor device, the semiconductor device comprising a work structure and a protection structure configured to protect the work structure, the method comprising:
Dependencies are inferred from the claim text.