Electrostatic chuck, etching apparatus, and method of manufacturing display device

An etching apparatus for making a substrate of a display device, the apparatus comprising:

• a vacuum chamber in which an etching process is performed on a target substrate having at least one processing area;
• a chuck disposed inside the vacuum chamber to support and fix the target substrate onto a first surface thereof;
• and
• a laser module disposed outside the vacuum chamber to irradiate a laser beam onto the processing area of the target substrate,
• wherein the first surface of the chuck includes a first area and a second area having indentations recessed in a thickness direction of the chuck, and at least a part of the indentations overlaps the processing area of the target substrate.