Wafer stocker
AssigneeSinfonia Technology Co., Ltd.
InventorsYasushi Taniyama, Toshihiro Kawai
Life of this patent
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Abstract
A wafer stocker capable of further improving an environment around wafers is provided. The wafer stocker includes a housing, a loading device provided on a front surface of the housing, a wafer cassette shelf arranged in the housing, a wafer transfer robot configured to move the wafers from a transfer container mounted on the loading device to a wafer cassette in the wafer cassette shelf, a wafer cassette delivery device configured to move the wafer cassette in the wafer cassette shelf to a stage having a different height, and a fan filter unit configured to generate a laminar flow in a wafer transfer space and in a wafer cassette transfer space.
Claims4
A wafer stocker, comprising:
- a housing;
- a loading device installed on a front surface of the housing and configured to mount a transfer container capable of accommodating a plurality of wafers;
- a wafer cassette shelf arranged in the housing and configured to store a plurality of wafer cassettes in a multi-stage manner, the plurality of wafer cassettes configured to store the plurality of wafers in a multi-stage manner;
- a wafer transfer robot configured to load and unload the wafers between the transfer container mounted on the loading device and the wafer cassettes stored in the wafer cassette shelf;
- a wafer cassette delivery device configured to move the wafer cassettes stored in a predetermined stage among a plurality of stages of the wafer cassette shelf to a stage having at least a height different from the predetermined stage;
- and
- a fan filter unit configured to generate a laminar flow in a wafer transfer space of the housing in which the wafer transfer robot is arranged and in a wafer cassette transfer space of the housing in which the wafer cassette delivery device is arranged.
Dependencies are inferred from the claim text.