System and method for controlling semiconductor manufacturing equipment

A control system of a semiconductor manufacturing equipment comprising:

• a sensor unit capturing a set of data related to a gas pressure in the semiconductor manufacturing equipment;
• a sensor interface receiving the set of data and generating at least one input signal for a database server;
• one or more processors;
• and
• one or more computer-readable non-transitory storage media coupled to the one or more processors and comprising instructions operable when executed by the one or more processors to cause the control system to:
• receive the at least one input signal from the database server and perform a front end process to generate a data signal;
• receive the data signal and perform an artificial intelligence (AI) analytical process to determine, according to the data signal, whether a malfunction related to the gas pressure has occurred in the semiconductor manufacturing equipment and generate an output signal;
• and
• generate an alert signal and a feedback signal according to the output signal, and transmit the alert signal to a user of the semiconductor manufacturing equipment.

A method for controlling a semiconductor manufacturing equipment comprising:

• capturing, by a sensor unit, a set of data related to a gas pressure in the semiconductor manufacturing equipment;
• receiving, by a sensor interface, the set of data and generating at least one input signal for a database server;
• receiving, by a front end subsystem, the at least one input signal from the database server and performing a front end process to generate a data signal;
• receiving, by a calculation subsystem, the data signal from the front end subsystem, the calculation subsystem performing an artificial intelligence (AI) analytical process to determine, according to the data signal, whether a malfunction related to the gas pressure has occurred in the semiconductor manufacturing equipment and generating an output signal;
• and
• generating, by a message and feedback subsystem, an alert signal and a feedback signal according to the output signal, the message and feedback subsystem transmitting the alert signal to a user of the semiconductor manufacturing equipment.