Adapter, connection device and supply system

A connection device for a liquid container of a supply system of a wet process module, in particular a lacquering module, for the treatment of substrates, in particular wafers, comprising

• an adapter for a liquid container of a supply system of a wet process module, in particular a lacquering module, for the treatment of substrates, in particular wafers, comprising
• a container part for fastening to the liquid container and a channel part for fastening to the supply system,
• wherein the container part has a central opening and a fastening device for fastening the container part to the liquid container,
• wherein the channel part comprises a continuous first channel portion and a continuous second channel portion, the first and the second channel portion each opening into the central opening of the container part,
• and further comprising a connection part having a liquid inlet channel and a pressure channel,
• wherein the first channel portion of the adapter opens into the liquid inlet channel and the second channel portion of the adapter opens into the pressure channel.

A supply system for a wet process module, in particular a lacquering module, for the treatment of substrates, in particular wafers, comprising

• a base having a support surface for supporting a liquid container thereon, and
• a connection device for a liquid container of a supply system of a wet process module, in particular a lacquering module, for the treatment of substrates, in particular wafers, comprising
• an adapter for a liquid container of a supply system of a wet process module, in particular a lacquering module, for the treatment of substrates, in particular wafers, comprising
• a container part for fastening to the liquid container and a channel part for fastening to the supply system,
• wherein the container part has a central opening and a fastening device for fastening the container part to the liquid container,
• wherein the channel part comprises a continuous first channel portion and a continuous second channel portion, the first and the second channel portion each opening into the central opening of the container part,
• and further comprising a connection part having a liquid inlet channel and a pressure channel,
• wherein the first channel portion of the adapter opens into the liquid inlet channel and the second channel portion of the adapter opens into the pressure channel,
• wherein the connection device is positioned spaced apart from and opposite the support surface,
• wherein the support surface is oblique to a horizontal.