Method for forming semiconductor structure

Abstract

A method for forming a semiconductor structure includes: providing a substrate, a gate dielectric layer and an undoped polycrystalline silicon layer sequentially stacked; performing a thermal doping process, and doping first doping ions in the polycrystalline silicon layer; and performing an ion implantation process, and doping second doping ions in a preset region of the polycrystalline silicon layer. The preset region is spaced at a preset distance from a surface of the polycrystalline silicon layer away from the gate dielectric layer in a direction perpendicular to a surface of the substrate.

Dependencies are inferred from the claim text.