Deposition-condition output device, method for outputting deposition condition, recording medium and depositon apparatus

A method for outputting a deposition condition, the method comprising:

• calculating a first deposition condition under which a target result of deposition is obtained, based on a liner regression model applied to a deposition process by a deposition apparatus;
• calculating a second deposition condition under which the target result of the deposition is obtained, based on a nonlinear regression model applied to the deposition process by the deposition apparatus, the second deposition condition being calculated by estimating, by the nonlinear regression model, a confidence interval of a predicted result of the deposition;
• determining whether the confidence interval of the predicted result estimated under the calculated second deposition condition satisfies a predetermined condition;
• and
• selecting one from among the first deposition condition and the second deposition condition, based on whether the confidence interval satisfies the predetermined condition.

A non-transitory recording medium storing a program that, when executed by a computer, causes the computer to perform a method, the method comprising:

• calculating a first deposition condition under which a target result of deposition is obtained, based on a liner regression model applied to a deposition process by a deposition apparatus;
• calculating a second deposition condition under which the target result of the deposition is obtained, based on a nonlinear regression model applied to the deposition process by the deposition apparatus, the second deposition condition being calculated by estimating, by the nonlinear regression model, a confidence interval of a predicted result of the deposition;
• determining whether the confidence interval of the predicted result estimated under the calculated second deposition condition satisfies a predetermined condition;
• and
• selecting one from among the first deposition condition and the second deposition condition, based on whether the confidence interval satisfies the predetermined condition.