Low profile deposition ring for enhanced life

A process kit for use in a process chamber, comprising:

• a deposition ring having an annular body, an inner wall extending upward from an inner portion of the annular body, an outer wall extending upward form an outer portion of the annular body to define a large deposition cavity having a U-shaped profile between the inner wall and the outer wall, wherein the outer wall includes an inner ledge and an outer ledge, wherein the inner ledge is raised with respect to the outer ledge, and wherein a width of the large deposition cavity is about 0.35 inches to about 0.60 inches;
• and
• a cover ring having an annular body, an inner leg extending downward from the annular body, an inner lip extending radially inward from the annular body, and a ledge extending between the inner leg and the inner lip, wherein the ledge is configured to rest on the outer ledge of the deposition ring.