Ion current droop compensation
AssigneeEagle Harbor Technologies, Inc.
InventorsChristopher Bowman, Connor Liston, Kenneth Miller, Timothy Ziemba
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AssigneeEagle Harbor Technologies, Inc.
InventorsChristopher Bowman, Connor Liston, Kenneth Miller, Timothy Ziemba
Estimating the term…
A pulse generator is disclosed. The pulse generator includes a DC source; a plurality of switches, a transformer; and a pulsing output. The pulse generator can be coupled with a plasma chamber. The pulsing output outputs high voltage pulses having a peak-to-peak voltage greater than 1 kV and a voltage portion between consecutive high voltage bipolar pulses that has a negative slope that substantially offsets the voltage reduction on a wafer within a plasma chamber due to an ion current. The resulting voltage at the wafer may be substantially flat between consecutive pulses.
A nanosecond pulser comprising:
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A pulse generator comprising:
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Dependencies are inferred from the claim text.