Method of aligning a charged particle beam apparatus

Method of training an alignment algorithm for aligning a charged particle beam apparatus, comprising the steps of:

• providing an alignment algorithm to be trained;
• providing data related to an alignment transition of said charged particle beam apparatus, wherein said alignment transition extends from a first alignment state towards a second alignment state;
• and
• providing said data to a modification algorithm for modifying said alignment algorithm, wherein use is made of a processing unit.

Charged particle beam apparatus, comprising:

• a charged particle emitter configured to emit a charged particle beam;
• a specimen holder configured to hold a specimen;
• wherein the charged particle beam apparatus is configured to operate in a plurality of alignment states;
• one or more processors;
• and
• a memory, wherein the memory stores non-transitory computer readable instructions that, when executed on the one or more processors, cause the system to:
• cause the charged particle beam apparatus to operate in a first alignment state;
• use an alignment algorithm to effect an alignment transition of the charged particle beam apparatus from said first alignment state towards a second alignment state of said charged particle beam apparatus;
• and
• provide data related to said alignment transition to a modification algorithm for modifying said alignment algorithm in order to effect a modified alignment transition.

A computer readable medium storing non-transitory computer readable instructions that, when executed on one or more processors, cause the one or processors system to cause a charged particle microscope system to:

• cause a charged particle beam apparatus to operate in a first alignment state;
• use an alignment algorithm to effect an alignment transition of the charged particle beam apparatus from said first alignment state towards a second alignment state of said charged particle beam apparatus;
• and
• provide data related to said alignment transition to a modification algorithm for modifying said alignment algorithm in order to effect a modified alignment transition.

A computer readable medium storing non-transitory computer readable instructions that, when executed on one or more processors, cause the one or processors system to cause a charged particle microscope system to:

• provide an alignment algorithm to be trained;
• provide data related to an alignment transition of said charged particle beam apparatus, wherein said alignment transition extends from a first alignment state towards a second alignment state;
• and
• provide said data to a modification algorithm for modifying said alignment algorithm, wherein use is made of a processing unit.