Thermoelectric field emission electron source and electron beam application device

A thermoelectric field emission electron source, comprising:

• an electron source having a needle shape;
• a metal wire to which the electron source is fixed and configured to heat the electron source;
• a stem fixed to an insulator and configured to energize the metal wire;
• a first electrode having a first opening portion and arranged such that a tip of the electron source protrudes from the first opening portion;
• a second electrode having a second opening portion;
• and
• an insulating body configured to position the first electrode and the second electrode such that a central axis of the first opening portion and a central axis of the second opening portion coincide with each other, and provide electrical insulation between the first electrode and the second electrode, wherein
• the insulating body is in contact with a refrigerant via a heat transfer material.

A thermoelectric field emission electron source, comprising:

• an electron source having a needle shape;
• a metal wire to which the electron source is fixed and configured to heat the electron source;
• a stem fixed to an insulator and configured to energize the metal wire;
• a first electrode having a first opening portion and arranged such that a tip of the electron source protrudes from the first opening portion;
• a second electrode having a second opening portion;
• and
• an insulating body configured to position the first electrode and the second electrode such that a central axis of the first opening portion and a central axis of the second opening portion coincide with each other, and provide electrical insulation between the first electrode and the second electrode, wherein
• a surface of the first electrode facing the metal wire is coated with a material having a reflectance higher than that of a material for the first electrode, or is subjected to mirror-polishing.

A thermoelectric field emission electron source, comprising:

• an electron source having a needle shape;
• a metal wire to which the electron source is fixed and configured to heat the electron source;
• a stem fixed to an insulator and configured to energize the metal wire;
• a first electrode having a first opening portion and arranged such that a tip of the electron source protrudes from the first opening portion;
• a second electrode having a second opening portion;
• and
• an insulating body configured to position the first electrode and the second electrode such that a central axis of the first opening portion and a central axis of the second opening portion coincide with each other, and provide electrical insulation between the first electrode and the second electrode, wherein
• a surface of the first electrode is coated with an inert metal.