Simulation method, simulation apparatus, film forming apparatus, article manufacturing method and non-transitory storage medium
AssigneeCanon Kabushiki Kaisha
InventorsSentaro Aihara, Yuichiro Oguchi
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AssigneeCanon Kabushiki Kaisha
InventorsSentaro Aihara, Yuichiro Oguchi
Estimating the term…
The present invention provides a simulation method of predicting a behavior of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on a first member into contact with a second member and forming a film of the curable composition in a space between the first member and the second member, the method including for each of the plurality of droplets of the curable composition, obtaining, based on whether the droplet merges with an adjacent droplet, an evaluation value for evaluating a relationship regarding a degree of merging with the adjacent droplet, and displaying, together with information indicating a state of the droplet corresponding to the evaluation value, the evaluation value obtained in the obtaining.
A simulation method of predicting a behavior of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on a first member into contact with a second member and forming a film of the curable composition in a space between the first member and the second member, the method comprising:
A simulation apparatus that predicts a behavior of a curable composition in a process of bringing a plurality of droplets of the curable composition arranged on a first member into contact with a second member and forming a film of the curable composition in a space between the first member and the second member, wherein,
Dependencies are inferred from the claim text.