In-plane vibration structure

An in-plane vibration structure comprising:

• a frame-shaped member defining an opening;
• a vibration portion in the opening;
• a beam portion connecting the frame-shaped member and the vibration portion;
• a piezoelectric film having a first main surface and a second main surface;
• a first electrode on the first main surface of the piezoelectric film and a second electrode on the first main surface of the piezoelectric film, the piezoelectric film configured to vibrate in a plane direction in response to a voltage being applied to the first electrode and the second electrode;
• a first support portion connecting the frame-shaped member and the first main surface of the piezoelectric film;
• a second support portion connecting the vibration portion and the first main surface of the piezoelectric film;
• a wiring member that has wiring for applying the voltage to the first electrode and the second electrode, the wiring member in contact with the first main surface of the piezoelectric film at a predetermined contact portion;
• a first conductive member disposed between the first support portion and the contact portion in a plan view of the in-plane vibration structure and connecting the first electrode and the wiring;
• and
• a second conductive member connecting the second electrode and the wiring.