Method for producing plated formed product
AssigneeJsr Corporation
InventorsNaoki NISHIGUCHI, Tomoyuki MATSUMOTO, Akira ISHII, Ayako ENDO
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AssigneeJsr Corporation
InventorsNaoki NISHIGUCHI, Tomoyuki MATSUMOTO, Akira ISHII, Ayako ENDO
Estimating the term…
A method for producing a plated formed product includes: a step (1) of forming on a substrate of the substrate having a metal film a resin film of a photosensitive resin composition containing a sulfur-containing compound having at least one selected from a mercapto group, a sulfide bond, and a polysulfide bond; a step (2) of exposing the resin film; a step (3) of developing the exposed resin film to form a resist pattern film; a step (4) of performing plasma treatment of a substrate having the resist pattern film on the metal film with oxygen-containing gas; and a step (5) of performing, after the plasma treatment, plating treatment with the resist pattern film as a mold.
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