Nano imprint stamps

A method of manufacturing a nano-imprint lithography stamp from a master template stamp, comprising:

• selectively securing a stamp backing material to a stamp chuck;
• positioning a master template stamp on a master chuck, the master template stamp including a master pattern thereon, the master chuck configured to support the master template stamp in facing relationship to the stamp backing material when it is selectively secured to the stamp chuck;
• including an electromagnetic energy curable material on and in the master pattern;
• and
• positioning a portion of the backing material supported by the stamp chuck the portion spaced therefrom and in contact with the electromagnetic energy curable material and exposing the electromagnetic curable material to electromagnetic energy an curing the curable material to form a solid thereof, and
• positioning the portion of the backing material in contact with the energy curable material, after it is cured, in contact with the stamp chuck.

An apparatus for manufacturing a nano-imprint lithography stamp from a master template stamp, comprising:

• a first stamp chuck configured to selectively secure a stamp backing material thereto;
• a first master chuck configured to support a cushion master, the cushion master including a blank pattern thereon, the first master chuck configured to support cushion master in facing relationship to the stamp backing material when selectively secured to the first stamp chuck;
• wherein
• the cushion master includes an electromagnetic energy curable material on and in the master blank pattern;
• and
• the first stamp chuck is configured and arranged to position a portion of the backing material thereon spaced therefrom and in contact with the electromagnetic energy curable material, and the first stamp chuck is further configured to position the portion of the backing material in contact with the energy curable material, after it is cured, in contact with the first stamp chuck.
• a second stamp chuck configured to selectively secure a stamp backing material thereto;
• a second master chuck configured to support a master template stamp, the master template stamp including a master pattern thereon, the second master chuck configured to support the master template stamp in facing relationship to the stamp backing material when selectively secured to the second stamp chuck;
• wherein the master template stamp includes an electromagnetic energy curable material on and in the master pattern;
• and
• the second stamp chuck is configured and arranged to position a portion of the backing material thereon spaced therefrom and in contact with the electromagnetic energy curable material, and the second stamp chuck is further configured to position the portion of the backing material in contact with the energy curable material, after it is cured, in contact with the second stamp chuck.