Process proximity correction method and the computing device for the same

A process proximity correction method of a process proximity correction computing device which performs a process proximity correction (PPC) through at least one of a plurality of processors, the process proximity correction method comprising:

• converting a target layout including a plurality of patterns into a first image;
• generating a first input channel by obtaining a first zoomed out version of the first image at a first magnification, and generating a second input channel by obtaining a second zoomed out version of the first image at a second magnification;
• receiving the first input channel and the second input channel and performing machine learning to predict an after-cleaning image (ACI);
• comparing the predicted after-cleaning image with a target value to generate after-cleaning image error;
• and
• adjusting the target layout and converting the target layout into a second image different from the first image, on the basis of the after-cleaning image error.

A process proximity correction computing device which includes a plurality of processors,

• wherein at least one of the plurality of processors executes a process proximity correction, and
• execution of the process proximity correction includes
• converting a target layout including a plurality of patterns into an image,
• zooming-in or zooming-out the image at a plurality of magnifications to generate a plurality of input channels,
• receiving the plurality of input channels and performing machine learning using the plurality of input channels, to predict after-cleaning image (ACI),
• comparing the predicted after-cleaning image with a target value to generate an after-cleaning image error, and
• adjusting the target layout on the basis of the after-cleaning image error.