Laser source apparatus with multiple plate continuum and measurement system therewith
AssigneeNational Tsing Hua University
InventorsShang-Da YANG, Chih-Hsuan Lu, Jhan-Yu Guo, Chao-Yang Lin
Life of this patent
Estimating the term…
Loading patent…
AssigneeNational Tsing Hua University
InventorsShang-Da YANG, Chih-Hsuan Lu, Jhan-Yu Guo, Chao-Yang Lin
Estimating the term…
A laser source apparatus is for providing a beam path to generate a first laser beam and a second laser beam. The laser source apparatus includes a laser generator, at least one spectrum broadening unit and a beam splitter on the beam path. The laser generator is configured to generate an original laser beam with a pulse duration smaller than 1 ps. The spectrum broadening unit is configured in a following stage of the laser generator. The spectrum broadening unit includes a multiple plate continuum. The multiple plate continuum includes a plurality of thin plates, and the thin plates are configured along the beam path in order. The beam splitter is configured in the following stage of the laser generator to divide the original laser beam into the first laser beam and the second laser beam.
A laser source apparatus, for providing a beam path to generate a first laser beam and a second laser beam, on the beam path, the laser source apparatus comprising:
A measurement system, for providing a beam path to generate a first laser beam and a second laser beam, at least one of the first laser beam and the second laser beam configured to be incident on a sample, on the beam path, the measurement system comprising:
Dependencies are inferred from the claim text.