Laser stabilizing system and laser source module

Abstract

A laser stabilizing system configured to stabilize a laser beam emitted from a laser source includes a beam steering device, a first beam splitter, a first light detector, a second beam splitter, and a second light detector. The beam steering device is configured to steer a direction and a position of the laser beam in four or more degrees of freedom. The first beam splitter is configured to split the laser beam from the beam steering device into a first partial beam and a second partial beam. The first light detector is disposed on a transmission path of the first partial beam. The second beam splitter is configured to split the second partial beam into a third partial beam and a fourth partial beam. The second light detector is disposed on a transmission path of the third partial beam. A laser source module is also provided.

Dependencies are inferred from the claim text.