Optical device, method for manufacturing an optical device and method for operating an optical device

Method for driving an optical device comprising an optical element which is mounted on a carrier by means of a platform, wherein

• an actuator exerts a force to deflect the optical element with respect to the carrier,
• the actuator is driven with a periodic excitation signal having an excitation frequency,
• the platform has a first resonance frequency in an x-direction and a second resonance frequency in a y-direction, wherein
• either the excitation frequency is larger or smaller than both the first and the second resonance frequency,
• or the excitation frequency is in between the first and the second resonance frequency and the absolute value of the difference between excitation frequency and the first resonance frequency and the difference of the excitation frequency and the second frequency is essentially identical.