Spatial frequency filter device for use with a laser beam, spatial frequency filter assembly having such a spatial frequency filter device, and method for spatial frequency filtering of a laser beam

Abstract

A spatial frequency filter device is for use with a laser beam. The device includes: a neutral region, which is configured to transmit or reflect the laser beam; and a deflecting region, which radially adjoins the neutral region and is configured to deflect beam components of the laser beam from a beam axis of the laser beam. The deflecting region has a constant portion, in which a deflecting effect on the beam components of the laser beam for each location in the constant portion is configured to be independent of a distance of a location from the neutral region. the deflecting region has a variation portion, in which the deflecting effect on the beam components of the laser beam is configured to vary, dependent on a distance from the neutral region.

Dependencies are inferred from the claim text.