Inertial Sensor And Inertial Measurement Unit
AssigneeSeiko Epson Corporation
InventorSatoru TANAKA
Life of this patent
Estimating the term…
Abstract
An inertial sensor includes: a substrate; a fixing part arranged at one surface of the substrate; a moving element having an opening and configured to swing about a rotation axis along a first direction; a support beam supporting the moving element as the rotation axis in the opening of the moving element; and a support part supporting the support beam. The support part includes a first part fixed to the fixing part, and a second part formed only of a part not fixed to the fixing part. A length in the first direction of the second part is longer than a length in the first direction of the first part.
Claims13
An inertial sensor comprising:
- a substrate;
- a fixing part arranged at one surface of the substrate;
- a moving element having an opening and configured to swing about a rotation axis along a first direction;
- a support beam supporting the moving element as the rotation axis in the opening of the moving element;
- and
- a support part supporting the support beam, wherein the support part includes a first part fixed to the fixing part, and a second part formed only of a part not fixed to the fixing part, and
- a length in the first direction of the second part is longer than a length in the first direction of the first part.
An inertial sensor comprising:
- a substrate;
- a fixing part arranged at one surface of the substrate;
- a moving element having an opening and configured to swing about a rotation axis along a first direction;
- a support beam supporting the moving element as the rotation axis in the opening of the moving element;
- and
- a support part supporting the support beam, wherein the support part includes a plurality of first parts fixed to the fixing part, and a plurality of second parts formed only of a part not fixed to the fixing part, and a length in the first direction of one second part, of the plurality of second parts, is longer than a length in the first direction of one first part, of the plurality of first parts.
An inertial sensor comprising:
- a substrate;
- a fixing part arranged at one surface of the substrate;
- a moving element having an opening and configured to swing about a rotation axis along a first direction;
- a support beam supporting the moving element as the rotation axis in the opening of the moving element;
- and
- a support part supporting the support beam, wherein the support part includes a plurality of first parts fixed to the fixing part, and a plurality of second parts formed only of a part not fixed to the fixing part,
- in the support part, the plurality of first parts and the plurality of second parts are provided next to each other along the first direction, and
- in the support part, a total length in the first direction of the plurality of second parts is longer than a total length in the first direction of the plurality of first parts.
Dependencies are inferred from the claim text.