Substrate processing apparatus and substrate processing method
AssigneeTokyo Electron Limited
InventorsKoudai Higashi, Masato Hayashi, Kohei Noguchi
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Abstract
A substrate processing apparatus includes a supply channel through which a liquid to be supplied to a substrate flows; and a foreign substance detecting unit configured to detect a foreign substance in the liquid based on a signal obtained when light, which is near-infrared light, is radiated toward a flow path forming unit constituting a part of the supply channel by a light projector so that light is emitted from the flow path forming unit and a light receiver receives the light emitted from the flow path forming unit.
Claims18
A substrate processing apparatus, comprising:
- a supply channel through which a liquid to be supplied to a substrate flows;
- and
- a foreign substance detecting unit configured to detect a foreign substance in the liquid based on a signal obtained when light, which is near-infrared light, is radiated toward a flow path forming unit constituting a part of the supply channel by a light projector so that light is emitted from the flow path forming unit and a light receiver receives the light emitted from the flow path forming unit.
A substrate processing method performed in a substrate processing apparatus,
- wherein the substrate processing apparatus includes:
- a supply channel through which a liquid to be supplied to a substrate flows;
- and
- a foreign substance detecting unit configured to detect a foreign substance in the liquid based on a signal obtained when light, which is near-infrared light, is radiated toward a flow path forming unit constituting a part of the supply channel by a light projector so that light is emitted from the flow path forming unit and a light receiver receives the light emitted from the flow path forming unit,
- wherein the substrate processing method includes:
- generating light toward the flow path forming unit constituting the part of the supply channel by the light projector;
- receiving light emitted from the flow path forming unit by the light receiver as a result of the generating of the light toward the flow path forming unit;
- and
- detecting a foreign substance in the liquid based on a signal obtained by the receiving of the light.
Dependencies are inferred from the claim text.