Thin film spectroellipsometric imaging

A thin film spectroellipsometric imaging device, comprising:

• an illuminator to direct light through a polarization generator system toward an extended area of a sample, wherein said illuminator is broadband, covering visible and infrared spectra, wherein said polarization generator system generates a plurality of polarization states, wherein said sample has a geometrical shape;
• an imaging system to form images of said extended area of said sample;
• a detection system to record said images, wherein said detection system comprises a plurality of spectral channels, covering visible and infrared spectra, wherein said detection system comprises a polarization analyzer system;
• a computer to display and analyze said recorded images from said detection system;
• and
• at least one reference phantom with known optical properties to replace said sample for calibration, wherein said at least one reference phantom has the same or substantially similar geometrical shape as of said sample or a segment of said sample.

A method performed by a thin film spectroellipsometric imaging device, comprising:

• directing light from an illuminator through a polarization generator system toward an extended area of a sample having a geometrical shape, wherein said illuminator is broadband, covering visible and infrared spectra, wherein said polarization generator system generates a plurality of polarization states;
• forming images of said extended area of said sample with an imaging system, wherein said images are formed on a detection system, wherein said imaging system or said detection system comprises a polarization analyzer system;
• adjusting said polarization generator system and said polarization analyzer system to obtain a series of polarimetric setups;
• recording said images of said sample in said series of polarimetric setups with said detection system, wherein said detection system measures in a plurality of spectral channels, covering visible and infrared spectra;
• replacing said sample with at least one reference phantom with known optical properties to record images of said at least one reference phantom, wherein said at least one reference phantom has the same or substantially similar geometrical shape as of said sample or a segment of said sample;
• and
• analyzing said recorded images of said sample and said at least one reference phantom with a computer.