Bolometer and method for manufacturing same
AssigneeNEC Corporation
InventorTomo TANAKA
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AssigneeNEC Corporation
InventorTomo TANAKA
Estimating the term…
An example objective of the present invention is to provide a bolometer capable of reducing its manufacturing cost. A bolometer according to an example aspect of the present invention includes: a substrate; and an infrared detection unit comprising a bolometer film, wherein the infrared detection unit is held on the substrate with a gap therebetween by a supporting unit, wherein the bolometer film is a carbon nanotube film includes semiconducting carbon nanotubes in an amount of 67% by mass or more of the total amount of carbon nanotubes, and the thickness of the carbon nanotube film is in the range of 10 nm to 1 μm, and the density of the carbon nanotube film is 0.3 g/cm3 or more.
A bolometer comprising:
A method for manufacturing a bolometer comprising
Dependencies are inferred from the claim text.