Measurement system and measurement method
AssigneeKabushiki Kaisha Nihon Micronics
InventorsMichitaka OKUTA, Yuki SAITO, Hisao NARITA, Shou HARAKO, Jukiya FUKUSHI, Tomokazu SAITO, Toshinaga TAKEYA
Life of this patent
Estimating the term…
Loading patent…
AssigneeKabushiki Kaisha Nihon Micronics
InventorsMichitaka OKUTA, Yuki SAITO, Hisao NARITA, Shou HARAKO, Jukiya FUKUSHI, Tomokazu SAITO, Toshinaga TAKEYA
Estimating the term…
A measurement method of receiving an emission light output from an optical semiconductor element on an incident end surface of an optical probe, shifts a relative position between the optical semiconductor element and the optical probe on a plane surface intersecting with an optical axis of the emission light, measures an incident intensity of the emission light at several positions, and obtains an incident intensity pattern showing a relationship between a change in the relative position and the respective incident intensities.
A measurement method of receiving, on an incident end surface of an optical probe, an emission light output from an optical semiconductor element, the method comprising:
A measurement system for measuring an emission light output from an optical semiconductor element, the system comprising:
Dependencies are inferred from the claim text.