Vibration sensor
AssigneeMitsubishi Electric Corporation
InventorsRokuzo HARA, Tomonori KIMURA, Koji IBATA, Yasuhiro NISHIOKA
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AssigneeMitsubishi Electric Corporation
InventorsRokuzo HARA, Tomonori KIMURA, Koji IBATA, Yasuhiro NISHIOKA
Estimating the term…
A test object includes a sensor housing for vibrating together with a test object in synchronism with vibration of the test object; a piezoelectric substrate for vibrating together with the sensor housing in synchronism with vibration of the sensor housing, where a first interdigital electrode, a first terminal, a second interdigital electrode, and a second terminal are disposed on a first surface of the piezoelectric substrate, and the piezoelectric substrate is disposed inside the sensor housing to be fixed to the sensor housing; an amplifier for receiving a signal output from the second terminal as an input signal, amplifying the received input signal, and transmitting the input signal after the amplification to the first terminal as an output signal; a deformable layer being elastic and having a first surface adhered to a second surface of the piezoelectric substrate; and a heavy object having a first surface adhered to a second surface of the deformable layer.
A vibration sensor comprising:
Dependencies are inferred from the claim text.