Mems gyroscope control circuit

A control circuit for controlling operation of a microelectromechanical system (MEMS) gyroscope including a driving mass sensing mass coupled to the driving mass, comprising:

• a driving circuit configured to drive the driving mass in a mechanical oscillation at a resonant drive frequency;
• an analog sensing circuit configured to sense a Coriolis displacement of the sensing mass;
• a digital circuit clocked by a digital clock signal and configured to process output from the analog sensing circuit and generate an angular velocity output signal indicative of the sensed Coriolis displacement;
• an oscillator configured to generate a system clock independent of and asynchronous to the resonant drive frequency;
• and
• a clock generator circuit configured to generate the digital clock signal from the system clock.

A control circuit for controlling operation of a microelectromechanical system (MEMS) gyroscope including a driving mass sensing mass coupled to the driving mass, comprising:

• a driving circuit configured to drive the driving mass in a mechanical oscillation at a resonant drive frequency;
• a sensing circuit configured to sense a Coriolis displacement of the sensing mass and generate a quadrature error signal from a quadrature component of the sensed Coriolis displacement;
• a digital circuit clocked by a digital clock signal and configured to process the quadrature error signal and apply a quadrature error compensation force to the sensing mass in response thereto;
• an oscillator configured to generate a system clock independent of and asynchronous to the resonant drive frequency;
• and
• a clock generator circuit configured to generate the digital clock signal from the system clock.