Substrate processing system, controller for substrate processing system and operation method of substrate processing system

A controller for a substrate processing system including a substrate processing component group constituted of a plurality of devices to be used in a substrate processing, wherein

• the substrate processing component group is configured to perform a test operation performing a predetermined operation without using a substrate and an actual operation performing the substrate processing using the substrate,
• when the actual operation is performed a plurality of times, the substrate processing component group has a first substrate processing component constituted of a plurality of devices to be used in a first time of the actual operation and a second substrate processing component constituted of a plurality of devices to be unused in the first time of the actual operation and used in a second and succeeding times of the actual operations, and
• when the actual operation is performed a plurality of times, the controller causes the first substrate processing component to perform the test operation and causes the actual operation of the first substrate processing component to be started after completion of the test operation of the first substrate processing component.

An operation method of a substrate processing system including a substrate processing component group constituted of a plurality of devices to be used in a substrate processing, wherein

• the substrate processing component group is configured to perform a test operation performing a predetermined operation without using a substrate and an actual operation performing the substrate processing using the substrate,
• when the actual operation is performed a plurality of times, the substrate processing component group has a first substrate processing component constituted of a plurality of devices to be used in a first time of the actual operation and a second substrate processing component constituted of a plurality of devices to be unused in the first time of the actual operation and used in a second and succeeding times of the actual operations, and
• when the actual operation is performed a plurality of times, the operation method comprises causing the first substrate processing component to perform the test operation and causing the actual operation of the first substrate processing component to be started after completion of the test operation of the first substrate processing component.