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US 2022/0033959 A1Published application
Crucible apparatus and deposition apparatus including the same
AssigneeSamsung Display Co., Ltd.
InventorsDongkyu Seo, Daeho Lee, Yeongrong Park, Junyong Shin, Byeongwook Yoo, Byungseok Lee
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Abstract
An apparatus for making substrates of a display device includes: a crucible to vaporize a deposition material and including a first metal; and a sacrificial material electrically connected to the crucible and including a second metal having a second ionization energy less than a first ionization energy of the first metal.
Claims20
An apparatus for making substrates of a display device, the apparatus comprising:
- a crucible to vaporize a deposition material and including a first metal;
- and
- a sacrificial material electrically connected to the crucible and including a second metal having a second ionization energy less than a first ionization energy of the first metal.
A deposition apparatus comprising:
- a deposition chamber in which a substrate may be received;
- a crucible disposed under the substrate;
- and
- a heating apparatus disposed outside the crucible to apply heat to the crucible, and
- wherein the crucible comprises:
- a housing to receive and vaporize a deposition material and including a first metal;
- and
- a sacrificial material electrically connected to the housing and including a second metal having a second ionization energy less than a first ionization energy of the first metal.
5 more elements
Dependencies are inferred from the claim text.