Wide bandwidth mems accelerometer for detecting vibrations

A Micro-Electromechanical System (MEMS) accelerometer, comprising:

• a supporting structure;
• a first deformable group and a second deformable group , which include, respectively, a first deformable cantilever element and a second deformable cantilever element, which are arranged in a direction parallel to a plane and each having a respective first end fixed to the supporting structure, and a respective second end, the first deformable group further including a first piezoelectric detection structure mechanically coupled to the first deformable cantilever element, the second deformable group further including a second piezoelectric detection structure mechanically coupled to the second deformable cantilever element;
• a first mobile mass and a second mobile mass, which are fixed, respectively, to the second end of the first deformable cantilever element and to the second end of the second deformable cantilever element and are staggered with respect to the first and second deformable cantilever elements, respectively, in a vertical direction transverse with respect to said plane;
• and
• a first elastic structure configured to elastically couple the first and second mobile masses.