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US 2022/0032624 A1Published application
Piezoelectric Device, Liquid Ejecting Head, Liquid Ejecting Apparatus, And Method For Producing Piezoelectric Device
AssigneeSeiko Epson Corporation
InventorYasuhiro ITAYAMA
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Abstract
A piezoelectric device includes a diaphragm, a piezoelectric actuator, and an orientation layer between the diaphragm and the piezoelectric layer. The piezoelectric actuator has a first electrode, a piezoelectric layer, and a second electrode, with the first electrode, a piezoelectric layer, and a second electrode on the diaphragm. The orientation layer is a stack of two or more tiers.
Claims20
A piezoelectric device comprising:
- a diaphragm;
- a piezoelectric actuator having a first electrode, a piezoelectric layer, and a second electrode, the first electrode, a piezoelectric layer, and a second electrode being on the diaphragm;
- and
- an orientation layer between the diaphragm and the piezoelectric layer, the orientation layer being a stack of two or more tiers.
1 more element
A liquid ejecting head comprising:
- a substrate having a recess;
- a diaphragm on a first side of the substrate;
- a piezoelectric actuator having a first electrode, a piezoelectric layer, and a second electrode, the first electrode being on the diaphragm;
- and
- an orientation layer between the diaphragm and the piezoelectric layer, the orientation layer being a stack of two or more tiers.
2 more elements
A method for producing a piezoelectric device including:
- a diaphragm;
- a piezoelectric actuator having a first electrode, a piezoelectric layer, and a second electrode, the first electrode being on the diaphragm;
- and
- an orientation layer between the diaphragm and the piezoelectric layer, the orientation layer being a stack of two or more tiers, the method comprising
- forming each tier of the orientation layer by a liquid phase method.
2 more elements
Dependencies are inferred from the claim text.